Automation of Electrostatic Material Property Measurement Procedures
نویسندگان
چکیده
The design of released microstructures depends on accurate knowledge of residual stresses and associated elastic constants. The MIT-developed material test procedure, M-Test, uses the variation of pull-in voltage with beam length to extract residual stress and elastic modulus from in-situ test structures. This thesis reports a fully automated computer-microvision procedure that automatically detects electrostatic pull-in and records the pull-in voltage of a full array of beams of different lengths, facilitating the measurement of elastic properties of microstructures. The method is now fully suitable for automatic test equipment in a manufacturing environment and thus brings M-Test to a new level of utility. Thesis Supervisor: Stephen D. Senturia Title: Barton L. Weller Professor of Electrical Engineering and Computer Science
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